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BS EN 62047-16:2015

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BS EN 62047-16:2015

Semiconductor devices. Micro-electromechanical devices - Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 78080 6
ICS 31.080.99 : Other semiconductor devices
Number of pages 18
Cross references EN 62047-16:2015,IEC 62047-16:2015
Set MYSTD-20STD
Year 2015
Country United Kingdom
Keyword BS EN 62047-16 ; BSEN62047-16 ; BS EN 6204716 ; BS EN 62047:16 ; BSEN 62047 16 ; BS EN62047 16