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BS EN 62047-16:2015
New product
BS EN 62047-16:2015
Semiconductor devices. Micro-electromechanical devices - Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methodsMore info
| Author | BSI |
|---|---|
| Editor | BSI |
| Document type | Standard |
| Format | File |
| EAN ISBN | 978 0 580 78080 6 |
| ICS | 31.080.99 : Other semiconductor devices
|
| Number of pages | 18 |
| Cross references | EN 62047-16:2015,IEC 62047-16:2015 |
| Set | MYSTD-20STD |
| Year | 2015 |
| Country | United Kingdom |
| Keyword | BS EN 62047-16 ; BSEN62047-16 ; BS EN 6204716 ; BS EN 62047:16 ; BSEN 62047 16 ; BS EN62047 16 |