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BS EN 62047-17:2015

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BS EN 62047-17:2015

Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 72203 5
ICS 31.080.99 : Other semiconductor devices
Number of pages 34
Cross references EN 62047-17:2015,IEC 62047-17:2015
Set MYSTD-20STD
Year 2015
Country United Kingdom
Keyword BS EN 62047-17 ; BSEN62047-17 ; BS EN 6204717 ; BS EN 62047:17 ; BSEN 62047 17 ; BS EN62047 17