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BS EN 62047-26:2016
New product
BS EN 62047-26:2016
Semiconductor devices. Micro-electromechanical devices - Description and measurement methods for micro trench and needle structuresMore info
| Author | BSI |
|---|---|
| Editor | BSI |
| Document type | Standard |
| Format | File |
| EAN ISBN | 978 0 580 85309 8 |
| ICS | 31.080.99 : Other semiconductor devices
|
| Number of pages | 34 |
| Cross references | EN 62047-26:2016,EN 60793-2-30:2009,IEC 62047-26:2016 |
| Set | MYSTD-20STD |
| Year | 2016 |
| Country | United Kingdom |
| Keyword | BS EN 62047-26 ; BSEN62047-26 ; BS EN 6204726 ; BS EN 62047:26 ; BSEN 62047 26 ; BS EN62047 26 |